Determination of Alkaline Component in Photoresist Remover
This application demonstrates the fractional determination of tetramethylammonium hydroxide (TMAH) and carbonates in a photoresist remover solution, a critical step in semiconductor manufacturing. The COM-A19 Automatic Titrator enables precise, automated analysis with minimal operator input.
Key Highlights
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Real-time titration curve display
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Simple maintenance with combination electrode
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Expandable configurations with burets and dispensers
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High sample throughput capability
Application Details
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Sample: Photoresist remover containing alkaline components
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Method: Fractional titration using the COM-A19 titrator with acid/salt functions
Result
Accurate quantification of alkaline components ensures consistency and compliance in semiconductor cleaning processes.
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[Alkaline Component in Photoresist Remover – PDF Download]
Related Instrument: COM-A19 Automatic Titrator
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