TMAH and Carbonate Analysis in Photoresist Removers | Hiranuma COM-A19 Potentiometric Titrator
Accurate determination of tetramethylammonium hydroxide (TMAH) and carbonate in photoresist remover and semiconductor process solutions is important for maintaining chemical concentration, process stability, and quality control.
The Hiranuma COM-A19 Automatic Potentiometric Titrator, supplied and supported by JM Science, provides automated potentiometric determination of alkaline components in these difficult semiconductor samples.
JM Science supplies Hiranuma automatic titrators and provides analytical application support for semiconductor, electronics, plating, CMP slurry, and specialty chemical laboratories throughout the United States, Canada, and Mexico.
Why Measure TMAH and Carbonate?
TMAH is widely used in semiconductor processing, including photoresist developer and remover applications.
During use and storage, alkaline solutions can absorb carbon dioxide from the atmosphere, producing carbonate. As a result, determining total alkalinity alone may not provide sufficient information about the condition or composition of the process solution.
Potentiometric titration allows the alkaline components to be determined accurately without relying on visual endpoint detection.
TMAH and Carbonate Determination by Potentiometric Titration
The Hiranuma method uses automatic potentiometric titration to determine the alkaline components of the sample.
A barium chloride addition method can be used to account for carbonate interference. Barium ions react with carbonate to form insoluble barium carbonate, allowing the alkaline components to be differentiated and quantified.
This approach provides an objective electrochemical endpoint and is particularly useful for semiconductor process solutions where accurate concentration control is required.
Recommended Titrator for TMAH and Carbonate Analysis
Hiranuma COM-A19 Automatic Potentiometric Titrator
The Hiranuma COM-A19, available from JM Science, is an advanced automatic potentiometric titrator designed for precise acid-base, precipitation, redox, complexometric, and other potentiometric titrations.
For TMAH and carbonate determination in photoresist remover solutions, the COM-A19 provides:
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Automatic potentiometric endpoint detection
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High-precision titrant delivery
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Programmable analytical methods
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Automated calculations and result reporting
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Multiple buret capability for more complex titration procedures
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Reproducible analysis independent of visual endpoint judgment
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Flexible configuration for semiconductor and specialty chemical applications
JM Science can assist laboratories with instrument configuration, method implementation, electrodes, reagents, and application support for this analysis.
Which Titrator Can Be Used for TMAH and Carbonate Analysis?
The Hiranuma COM-A19 Automatic Potentiometric Titrator can be used for the determination of TMAH and carbonate in semiconductor photoresist remover and related alkaline process solutions.
The COM-A19 provides automated titrant addition and potentiometric endpoint detection, making it suitable for routine quality-control testing where reproducibility and accurate differentiation of alkaline components are important.
For laboratories requiring a more economical potentiometric titration system, JM Science can also evaluate whether the Hiranuma COM-28/28S configuration is appropriate for the specific method and sample requirements.
Semiconductor Process Applications
In addition to TMAH and carbonate determination, Hiranuma potentiometric titration systems supplied by JM Science can be used for analytical applications involving:
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Photoresist developers and removers
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Semiconductor process chemicals
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Acid and alkaline mixtures
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Hydrofluoric acid-containing process solutions
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Nitric and phosphoric acid mixtures
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Plating bath analysis
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CMP slurry analysis
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Hydrogen peroxide determination
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Chloride and other ionic components
These applications make automatic potentiometric titration useful for both incoming chemical inspection and routine semiconductor process quality control.
Why JM Science?
JM Science is a North American supplier of Hiranuma automatic titration systems and has more than 35 years of experience supporting analytical laboratories.
JM Science provides:
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Hiranuma COM-A19 automatic potentiometric titrators
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Hiranuma COM-28/28S potentiometric titrators
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Application and method support
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Electrodes, burets, reagents, and replacement parts
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Installation and technical support
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Semiconductor and electronics analytical solutions
Our goal is not simply to supply a titrator, but to help laboratories configure the appropriate system for the analytical method and sample.
Need Help With TMAH or Photoresist Remover Analysis?
JM Science can help determine the appropriate Hiranuma COM-A19 or COM-28/28S titrator configuration for TMAH, carbonate, photoresist remover, and other semiconductor process chemical analyses.
Contact JM Science
Email: sales@jmscience.com
Tel: 716-774-8706
Ask us about your sample, expected concentration range, and analytical requirements, and we can recommend an appropriate titration configuration and method.
